Ventra - Cutting edge carbon graphite products and solutions
Ventra - Cutting edge carbon graphite products and solutions
Machined Precision Parts
Precision-machined clamping devices used to hold semiconductor wafers, solar ingots or quartz tubing during ion implantation, RTP or epitaxial deposition. Isostatic graphite ensures dimensional stability at process temperature.
Features
Isotropic thermal expansion – uniform clamp force across wafer, reducing slip lines
Low particle generation – fine grain <20 µm minimises wafer contamination
High flexural strength – permits thin fingers for maximum wafer exposure
Ready coating – SiC or PyC layers available for ultra-high purity environments
Industrial Applications
Semiconductor
Ion-implant chucks and RTP susceptors
Solar
Gripper fingers for wafer transfer robots
General Industrials
Molybdenum-backup chucks for sapphire polishing
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